DEFECTS & DISORDERS IN SEMICONDUCTORS

SANDIP KUMAR PAN

Abstract


                     Defects are always undesirable,if only as an indication that the production technology is not fully understood & controlled. Hence it is necessary to have techniques to locate,identify & determine the origin of defects present.

                                                                          Defects in semiconductor are a problem because of their electronic & optoelectronic effect.Thus it is necessary to be able to determine the electronic properties of defects.A number of techniques are also available for the electronic characterization of defect microstructure such as SEM-EBIC(Scanning electron microscope- electron beam induced current),SEM-CL(Cathodo luminescence)& LBIC (Laser or light beam induced current)

                     Defects are always undesirable,if only as an indication that the

                            production technology is not fully understood & controlled.Hence

                            it is necessary to have techniques to locate,identify & determine the

                             origin of defects present.

                                                                          Defects in semiconductor are a problem

                             because of their electronic & optoelectronic effect.Thus it is necessary

                             to be able to determine the electronic properties of defects.A number

                             of techniques are also available for the electronic characterization of

                             defect microstructure such as SEM-EBIC(Scanning electron microscope-

                              electron beam induced current),SEM-CL(Cathodo luminescence)& LBIC

                              (Laser or light beam induced current)


Keywords


Defect Density,Point Defects,Vacancy,Silicon

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References


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